Toward nano-accuracy in scanning beam interference lithography
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2006.
Main Author: | Montoya, Juan, 1976- |
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Other Authors: | Mark Schattenburg. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2007
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/37909 |
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