Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
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| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/38039 |
| _version_ | 1811076750559412224 |
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| author | Tsao, Che-Chih |
| author2 | . |
| author_facet | . Tsao, Che-Chih |
| author_sort | Tsao, Che-Chih |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. |
| first_indexed | 2024-09-23T10:26:53Z |
| format | Thesis |
| id | mit-1721.1/38039 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:26:53Z |
| publishDate | 2007 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/380392019-04-11T03:24:21Z Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems Tsao, Che-Chih . Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. Includes bibliographical references. by Che-Chih Tsao. Ph.D. 2007-07-18T13:27:58Z 2007-07-18T13:27:58Z 1994 1995 Thesis http://hdl.handle.net/1721.1/38039 32599890 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 1 v. (various pagings) application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering Tsao, Che-Chih Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title_full | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title_fullStr | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title_full_unstemmed | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title_short | Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems |
| title_sort | photo electroforming a new manufacturing process for micro electro mechanical systems |
| topic | Mechanical Engineering |
| url | http://hdl.handle.net/1721.1/38039 |
| work_keys_str_mv | AT tsaochechih photoelectroforminganewmanufacturingprocessformicroelectromechanicalsystems |