Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems

Photo-electroforming, a new manufacturing process for micro-electro-mechanical systems

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.

Bibliographic Details
Main Author: Tsao, Che-Chih
Other Authors: .
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/38039

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