Load deflection analysis for determining mechanical properties of thin films with tensile and compressive residual stresses

Load deflection analysis for determining mechanical properties of thin films with tensile and compressive residual stresses

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Bulsara, Mayank T. (Mayank Thakordas)
Other Authors:	Stuart B. Brown.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2007
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/38097

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