A linear ultrasonic motor for nano-technology

A linear ultrasonic motor for nano-technology

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.

Bibliographic Details
Main Author: Choi, Henry O
Other Authors: Kamal-Youcef-Toumi.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/38148

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