Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide
The effect of Ni and Ni(Pt) alloy with ~5 and 10 at. % Pt on the agglomeration and Ge out-diffusion in Nickel germanosilicide formed on Si₀.₇₅Ge₀.₂₅(100) has been studied. A remarkable improvement in the agglomeration behavior with in...
| Principais autores: | , , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | en_US |
| Publicado em: |
2003
|
| Assuntos: | |
| Acesso em linha: | http://hdl.handle.net/1721.1/3825 |
| _version_ | 1826192355769712640 |
|---|---|
| author | Jin, Lijuan Pey, Kin Leong Choi, Wee Kiong Fitzgerald, Eugene A. Antoniadis, Dimitri A. Chi, D.Z. |
| author_facet | Jin, Lijuan Pey, Kin Leong Choi, Wee Kiong Fitzgerald, Eugene A. Antoniadis, Dimitri A. Chi, D.Z. |
| author_sort | Jin, Lijuan |
| collection | MIT |
| description | The effect of Ni and Ni(Pt) alloy with ~5 and 10 at. % Pt on the agglomeration and Ge out-diffusion in Nickel germanosilicide formed on Si₀.₇₅Ge₀.₂₅(100) has been studied. A remarkable improvement in the agglomeration behavior with increasing Pt atomic percentage is observed by sheet resistance measurements and scanning electron microscopy (SEM). In addition, x-ray diffraction (XRD) shows that only NiSiGe or Ni(Pt)SiGe phase exists from 400 to 800°C. However, Ge out-diffusion from the monogermanosilicide grains is obvious at 600°C and 700°C for Ni/SiGe and Ni(Pt)(Pt at.%~10%)/SiGe, respectively, evident by XRD and micro-Raman spectroscopy. The improved melting temperature of Ni(Pt)SiGe solution compared to that of NiSiGe is the likely reason of seeing better surface morphology and suppressing Ge out-diffusion of the germanosilicide grains observed. |
| first_indexed | 2024-09-23T09:10:32Z |
| format | Article |
| id | mit-1721.1/3825 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T09:10:32Z |
| publishDate | 2003 |
| record_format | dspace |
| spelling | mit-1721.1/38252019-04-10T21:09:14Z Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide Jin, Lijuan Pey, Kin Leong Choi, Wee Kiong Fitzgerald, Eugene A. Antoniadis, Dimitri A. Chi, D.Z. agglomeration Ge out-diffusion The effect of Ni and Ni(Pt) alloy with ~5 and 10 at. % Pt on the agglomeration and Ge out-diffusion in Nickel germanosilicide formed on Si₀.₇₅Ge₀.₂₅(100) has been studied. A remarkable improvement in the agglomeration behavior with increasing Pt atomic percentage is observed by sheet resistance measurements and scanning electron microscopy (SEM). In addition, x-ray diffraction (XRD) shows that only NiSiGe or Ni(Pt)SiGe phase exists from 400 to 800°C. However, Ge out-diffusion from the monogermanosilicide grains is obvious at 600°C and 700°C for Ni/SiGe and Ni(Pt)(Pt at.%~10%)/SiGe, respectively, evident by XRD and micro-Raman spectroscopy. The improved melting temperature of Ni(Pt)SiGe solution compared to that of NiSiGe is the likely reason of seeing better surface morphology and suppressing Ge out-diffusion of the germanosilicide grains observed. Singapore-MIT Alliance (SMA) 2003-12-13T16:23:54Z 2003-12-13T16:23:54Z 2004-01 Article http://hdl.handle.net/1721.1/3825 en_US Advanced Materials for Micro- and Nano-Systems (AMMNS); 1019837 bytes application/pdf application/pdf |
| spellingShingle | agglomeration Ge out-diffusion Jin, Lijuan Pey, Kin Leong Choi, Wee Kiong Fitzgerald, Eugene A. Antoniadis, Dimitri A. Chi, D.Z. Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title_full | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title_fullStr | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title_full_unstemmed | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title_short | Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide |
| title_sort | effect of pt on agglomeration and ge out diffusion in ni pt germanosilicide |
| topic | agglomeration Ge out-diffusion |
| url | http://hdl.handle.net/1721.1/3825 |
| work_keys_str_mv | AT jinlijuan effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide AT peykinleong effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide AT choiweekiong effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide AT fitzgeraldeugenea effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide AT antoniadisdimitria effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide AT chidz effectofptonagglomerationandgeoutdiffusioninniptgermanosilicide |