Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide

Effect of Pt on agglomeration and Ge out-diffusion in Ni(Pt) germanosilicide

The effect of Ni and Ni(Pt) alloy with ~5 and 10 at. % Pt on the agglomeration and Ge out-diffusion in Nickel germanosilicide formed on Si₀.₇₅Ge₀.₂₅(100) has been studied. A remarkable improvement in the agglomeration behavior with in...

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Detalhes bibliográficos
Principais autores: Jin, Lijuan, Pey, Kin Leong, Choi, Wee Kiong, Fitzgerald, Eugene A., Antoniadis, Dimitri A., Chi, D.Z.
Formato: Artigo
Idioma:en_US
Publicado em: 2003
Assuntos:
agglomeration
Ge out-diffusion
Acesso em linha:http://hdl.handle.net/1721.1/3825

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