Investigation on Thin Film Lithium Microbatteries

Investigation on Thin Film Lithium Microbatteries

Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-...

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Bibliographic Details
Main Authors:	Shi, Z., Lü, L., Ceder, Gerbrand
Format:	Article
Language:	en_US
Published:	2003
Subjects:	thin film lithium microbatteries pulsed-laser deposition
Online Access:	http://hdl.handle.net/1721.1/3831

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