Analysis of a diamond CVD process using computer simulation
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
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| Formato: | Tese |
| Idioma: | eng |
| Publicado em: |
Massachusetts Institute of Technology
2007
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| Acesso em linha: | http://hdl.handle.net/1721.1/38416 |
| _version_ | 1826213133721534464 |
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| author | Nagai, Masaki |
| author2 | David K. Roylance. |
| author_facet | David K. Roylance. Nagai, Masaki |
| author_sort | Nagai, Masaki |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. |
| first_indexed | 2024-09-23T15:43:51Z |
| format | Thesis |
| id | mit-1721.1/38416 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:43:51Z |
| publishDate | 2007 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/384162019-04-12T09:15:58Z Analysis of a diamond CVD process using computer simulation Analysis of a diamond chemical vapor deposition process using computer simulation. Nagai, Masaki David K. Roylance. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (leaves 98-100). by Masaki Nagai. M.S. 2007-08-03T18:41:04Z 2007-08-03T18:41:04Z 1996 1996 Thesis http://hdl.handle.net/1721.1/38416 36152102 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 114 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Nagai, Masaki Analysis of a diamond CVD process using computer simulation |
| title | Analysis of a diamond CVD process using computer simulation |
| title_full | Analysis of a diamond CVD process using computer simulation |
| title_fullStr | Analysis of a diamond CVD process using computer simulation |
| title_full_unstemmed | Analysis of a diamond CVD process using computer simulation |
| title_short | Analysis of a diamond CVD process using computer simulation |
| title_sort | analysis of a diamond cvd process using computer simulation |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/38416 |
| work_keys_str_mv | AT nagaimasaki analysisofadiamondcvdprocessusingcomputersimulation AT nagaimasaki analysisofadiamondchemicalvapordepositionprocessusingcomputersimulation |