Design and prototype : a manufacturing system for the soft lithography technique

Design and prototype : a manufacturing system for the soft lithography technique

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, September 2006.

Bibliographic Details
Main Author: Cao, Arthur Y. (Arthur Yao)
Other Authors: David E. Hardt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/38562
Description
Summary:Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, September 2006.

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