Design and prototype : a manufacturing system for the soft lithography technique
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, September 2006.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2007
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Online Access: | http://hdl.handle.net/1721.1/38562 |
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author | Cao, Arthur Y. (Arthur Yao) |
author2 | David E. Hardt. |
author_facet | David E. Hardt. Cao, Arthur Y. (Arthur Yao) |
author_sort | Cao, Arthur Y. (Arthur Yao) |
collection | MIT |
description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, September 2006. |
first_indexed | 2024-09-23T08:44:21Z |
format | Thesis |
id | mit-1721.1/38562 |
institution | Massachusetts Institute of Technology |
language | eng |
last_indexed | 2024-09-23T08:44:21Z |
publishDate | 2007 |
publisher | Massachusetts Institute of Technology |
record_format | dspace |
spelling | mit-1721.1/385622019-04-10T07:15:06Z Design and prototype : a manufacturing system for the soft lithography technique Manufacturing system for the soft lithography technique Cao, Arthur Y. (Arthur Yao) David E. Hardt. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, September 2006. "August 2006." Includes bibliographical references (leaves 155-158). Ever since 1998 when the term "soft lithography" was first created, soft lithography techniques have drawn close attention of the academia and the industry. Micro contact printing is by far the most widely used soft lithography technique in the industry. The objective of this research project is to design and prototype a micro contact printing machine which could achieve high scalability, feature resolution and production rate. It should also fulfill quality requirements, in terms of minimizing the tool deformation and air trapping furing printing. A reel-to-reel design with wipers to create linear propagation during stamping was used in the final design. The final prototype was made of three stations, the printing station, the inking station and the rotary system, which switches the stamps between printing and inking station. The other important design novelty is that the PDMS stamp has been fixed and the Au coated PET was actually applied to the stamp to get printed. The design minimizes the deformation on the stamp and also eases the linear propagation of the printing interface. The reel-to-reel design can be easily scaled up for mass production with large volume. The prototype was tested and the printing samples were made. by Arthur Y. Cao. M.Eng. 2007-08-29T20:28:48Z 2007-08-29T20:28:48Z 2006 Thesis http://hdl.handle.net/1721.1/38562 153313947 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 158 leaves application/pdf Massachusetts Institute of Technology |
spellingShingle | Mechanical Engineering. Cao, Arthur Y. (Arthur Yao) Design and prototype : a manufacturing system for the soft lithography technique |
title | Design and prototype : a manufacturing system for the soft lithography technique |
title_full | Design and prototype : a manufacturing system for the soft lithography technique |
title_fullStr | Design and prototype : a manufacturing system for the soft lithography technique |
title_full_unstemmed | Design and prototype : a manufacturing system for the soft lithography technique |
title_short | Design and prototype : a manufacturing system for the soft lithography technique |
title_sort | design and prototype a manufacturing system for the soft lithography technique |
topic | Mechanical Engineering. |
url | http://hdl.handle.net/1721.1/38562 |
work_keys_str_mv | AT caoarthuryarthuryao designandprototypeamanufacturingsystemforthesoftlithographytechnique AT caoarthuryarthuryao manufacturingsystemforthesoftlithographytechnique |