On Dual Actuation in Atomic Force Microscopes
In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamenta...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | en_US |
| Published: |
2003
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/3914 |