Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

Bibliografiska uppgifter
Huvudupphovsman: Cai, Hong, Ph. D. Massachusetts Institute of Technology
Övriga upphovsmän: Duane S. Boning and Carl V. Thompson.
Materialtyp: Lärdomsprov
Språk:eng
Publicerad: Massachusetts Institute of Technology 2007
Ämnen:
Materials Science and Engineering.
Länkar:http://hdl.handle.net/1721.1/39551
Beskrivning
Sammanfattning:Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

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