Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

书目详细资料
主要作者:	Cai, Hong, Ph. D. Massachusetts Institute of Technology
其他作者:	Duane S. Boning and Carl V. Thompson.
格式:	Thesis
语言:	eng
出版:	Massachusetts Institute of Technology 2007
主题:	Materials Science and Engineering.
在线阅读:	http://hdl.handle.net/1721.1/39551

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