Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Modeling of pattern dependencies in the fabrication of multilevel copper metallization

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

Bibliographic Details
Main Author: Cai, Hong, Ph. D. Massachusetts Institute of Technology
Other Authors: Duane S. Boning and Carl V. Thompson.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/39551

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