A Novel Testing Apparatus for Tribological Studies at the Small Scale
A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications...
| Main Authors: | , |
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| Format: | Article |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://hdl.handle.net/1721.1/3982 |
| _version_ | 1811086767478013952 |
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| author | Gearing, B.P. Anand, Lallit |
| author_facet | Gearing, B.P. Anand, Lallit |
| author_sort | Gearing, B.P. |
| collection | MIT |
| description | A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications. Tribological tests may be performed with normal and tangential forces in the µN to N range and relative sliding displacements in the nm to mm range. In this testing range, the new experimental apparatus represents an improvement over existing techniques for tribological studies at the small scale. |
| first_indexed | 2024-09-23T13:34:25Z |
| format | Article |
| id | mit-1721.1/3982 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T13:34:25Z |
| publishDate | 2003 |
| record_format | dspace |
| spelling | mit-1721.1/39822019-04-12T08:08:37Z A Novel Testing Apparatus for Tribological Studies at the Small Scale Gearing, B.P. Anand, Lallit MEMS friction mechanical testing A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications. Tribological tests may be performed with normal and tangential forces in the µN to N range and relative sliding displacements in the nm to mm range. In this testing range, the new experimental apparatus represents an improvement over existing techniques for tribological studies at the small scale. Singapore-MIT Alliance (SMA) 2003-12-22T20:40:48Z 2003-12-22T20:40:48Z 2002-01 Article http://hdl.handle.net/1721.1/3982 en_US Advanced Materials for Micro- and Nano-Systems (AMMNS); 3396989 bytes application/pdf application/pdf |
| spellingShingle | MEMS friction mechanical testing Gearing, B.P. Anand, Lallit A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title | A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title_full | A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title_fullStr | A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title_full_unstemmed | A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title_short | A Novel Testing Apparatus for Tribological Studies at the Small Scale |
| title_sort | novel testing apparatus for tribological studies at the small scale |
| topic | MEMS friction mechanical testing |
| url | http://hdl.handle.net/1721.1/3982 |
| work_keys_str_mv | AT gearingbp anoveltestingapparatusfortribologicalstudiesatthesmallscale AT anandlallit anoveltestingapparatusfortribologicalstudiesatthesmallscale AT gearingbp noveltestingapparatusfortribologicalstudiesatthesmallscale AT anandlallit noveltestingapparatusfortribologicalstudiesatthesmallscale |