Design and prototype fabrication of a manipulator for semiconductor test equipment

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.

Bibliographic Details
Main Author:	Vallance, Robert Ryan
Other Authors:	Alexander H. Slocum.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/40216

Internet

http://hdl.handle.net/1721.1/40216