Design of an STM and EPL control system and linear actuator preload diaphragm

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007.

Bibliographic Details
Main Author:	Roan, Earl Taylor
Other Authors:	Martin L. Culpepper.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/40310

Internet

http://hdl.handle.net/1721.1/40310