Design of an STM and EPL control system and linear actuator preload diaphragm

Design of an STM and EPL control system and linear actuator preload diaphragm

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007.

Bibliographic Details
Main Author: Roan, Earl Taylor
Other Authors: Martin L. Culpepper.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/40310

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