Environmentally benign manufacturing of three dimensional integrated circuits

Environmentally benign manufacturing of three dimensional integrated circuits

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.

Bibliographic Details
Main Author: Somani, Ajay
Other Authors: Duane S. Boning.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/40350

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