Gold-electroplating technology for X-ray-mask fabrication

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.

Bibliographic Details
Main Author: Yee, Kenneth W. (Kenneth Wee-Koon)
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Online Access:http://hdl.handle.net/1721.1/40601
Description
Summary:Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.