Gold-electroplating technology for X-ray-mask fabrication
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/40601 |
| _version_ | 1811088837760253952 |
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| author | Yee, Kenneth W. (Kenneth Wee-Koon) |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Yee, Kenneth W. (Kenneth Wee-Koon) |
| author_sort | Yee, Kenneth W. (Kenneth Wee-Koon) |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. |
| first_indexed | 2024-09-23T14:07:58Z |
| format | Thesis |
| id | mit-1721.1/40601 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:07:58Z |
| publishDate | 2008 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/406012019-04-12T15:59:46Z Gold-electroplating technology for X-ray-mask fabrication Yee, Kenneth W. (Kenneth Wee-Koon) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996. Includes bibliographical references (p. 43-45). by Kenneth W. Yee. M.S. 2008-02-27T23:00:15Z 2008-02-27T23:00:15Z 1996 1996 Thesis http://hdl.handle.net/1721.1/40601 35994867 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 45 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Yee, Kenneth W. (Kenneth Wee-Koon) Gold-electroplating technology for X-ray-mask fabrication |
| title | Gold-electroplating technology for X-ray-mask fabrication |
| title_full | Gold-electroplating technology for X-ray-mask fabrication |
| title_fullStr | Gold-electroplating technology for X-ray-mask fabrication |
| title_full_unstemmed | Gold-electroplating technology for X-ray-mask fabrication |
| title_short | Gold-electroplating technology for X-ray-mask fabrication |
| title_sort | gold electroplating technology for x ray mask fabrication |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/40601 |
| work_keys_str_mv | AT yeekennethwkennethweekoon goldelectroplatingtechnologyforxraymaskfabrication |