Gold-electroplating technology for X-ray-mask fabrication
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Main Author: | Yee, Kenneth W. (Kenneth Wee-Koon) |
---|---|
Other Authors: | Henry I. Smith. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/40601 |
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