Non-perfluorocompound chemistries for plasma etching of dielectrics

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.

Detalhes bibliográficos
Autor principal:	Tao, Benjamin A. (Benjamin Albert)
Outros Autores:	L. Rafael Reif.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2008
Assuntos:	Materials Science and Engineering
Acesso em linha:	http://hdl.handle.net/1721.1/40603

Internet

http://hdl.handle.net/1721.1/40603