Non-perfluorocompound chemistries for plasma etching of dielectrics

Non-perfluorocompound chemistries for plasma etching of dielectrics

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.

Bibliographic Details
Main Author:	Tao, Benjamin A. (Benjamin Albert)
Other Authors:	L. Rafael Reif.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2008
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/40603

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