Variation reduction of a closed-loop precision ceramic micromachining process
Thesis (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/41429 |
| _version_ | 1826205344271958016 |
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| author | Fanger, David J. (David James) |
| author2 | James M. Utterback and Michael J. Cima. |
| author_facet | James M. Utterback and Michael J. Cima. Fanger, David J. (David James) |
| author_sort | Fanger, David J. (David James) |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. |
| first_indexed | 2024-09-23T13:11:30Z |
| format | Thesis |
| id | mit-1721.1/41429 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:11:30Z |
| publishDate | 2008 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/414292020-03-30T22:42:28Z Variation reduction of a closed-loop precision ceramic micromachining process Fanger, David J. (David James) James M. Utterback and Michael J. Cima. Massachusetts Institute of Technology. Department of Materials Science and Engineering Sloan School of Management Sloan School of Management Materials Science and Engineering Thesis (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (p. 125-132). This report details the investigation of the micromachining of a TiC.A1203 ceramic using a closed-loop lapping process. Currently the micromachining process laps a ceramic bar with only a priori flatness adjustment. Bar flatness is adjusted prior to the lap using optical measurement of lithography targets. The average value of a critical dimension determines lap completion. The critical dimension is determined with an embedded electronic lapping guide (ELG). The problem with this technique, as it is currently employed, is high product loss due to large variance of the critical dimension across the bar. A six microinch standard deviation is desired. Any product above or below specified critical dimension limits are scrapped, so the variance reduction directly impacts immediate and downstream process yields. An alternative approach is proposed using electrostrictive actuators in a closed control loop to deform the bar during lap processing. The closed-loop lapping (CLL) process significantly decreases critical dimension process variance. by David J. Fanger. S.M. 2008-04-23T14:58:35Z 2008-04-23T14:58:35Z 1996 1996 Thesis http://hdl.handle.net/1721.1/41429 43071867 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 142 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Sloan School of Management Materials Science and Engineering Fanger, David J. (David James) Variation reduction of a closed-loop precision ceramic micromachining process |
| title | Variation reduction of a closed-loop precision ceramic micromachining process |
| title_full | Variation reduction of a closed-loop precision ceramic micromachining process |
| title_fullStr | Variation reduction of a closed-loop precision ceramic micromachining process |
| title_full_unstemmed | Variation reduction of a closed-loop precision ceramic micromachining process |
| title_short | Variation reduction of a closed-loop precision ceramic micromachining process |
| title_sort | variation reduction of a closed loop precision ceramic micromachining process |
| topic | Sloan School of Management Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/41429 |
| work_keys_str_mv | AT fangerdavidjdavidjames variationreductionofaclosedloopprecisionceramicmicromachiningprocess |