Inorganic x-ray mask technology for quantum-effect devices

Includes bibliographical references (p. 116-123).

Bibliographic Details
Other Authors: Chu, William.
Language:eng
Published: Research Laboratory of Electronics, Massachusetts Institute of Technology 2004
Subjects:
Online Access:http://hdl.handle.net/1721.1/4176
_version_ 1826196032376012800
author2 Chu, William.
author_facet Chu, William.
collection MIT
description Includes bibliographical references (p. 116-123).
first_indexed 2024-09-23T10:19:44Z
id mit-1721.1/4176
institution Massachusetts Institute of Technology
language eng
last_indexed 2024-09-23T10:19:44Z
publishDate 2004
publisher Research Laboratory of Electronics, Massachusetts Institute of Technology
record_format dspace
spelling mit-1721.1/41762019-04-12T08:19:57Z Inorganic x-ray mask technology for quantum-effect devices Chu, William. TK7855.M41 R43 no.577 Includes bibliographical references (p. 116-123). Supported in part by the Joint Services Electronics Program. DAAL03-92-C-0001 Supported in part by the National Science Foundation. ECS 90-16437 Supported in part by the U.S. Air Force Office of Scientific Research, and the Defense Advanced Research Projects Agency. N00019-92-K-0021 William Chu. 2004-03-02T18:29:03Z 2004-03-02T18:29:03Z 1993 no. 577 http://hdl.handle.net/1721.1/4176 eng Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 577. 123 p. 9596652 bytes application/pdf application/pdf Research Laboratory of Electronics, Massachusetts Institute of Technology
spellingShingle TK7855.M41 R43 no.577
Inorganic x-ray mask technology for quantum-effect devices
title Inorganic x-ray mask technology for quantum-effect devices
title_full Inorganic x-ray mask technology for quantum-effect devices
title_fullStr Inorganic x-ray mask technology for quantum-effect devices
title_full_unstemmed Inorganic x-ray mask technology for quantum-effect devices
title_short Inorganic x-ray mask technology for quantum-effect devices
title_sort inorganic x ray mask technology for quantum effect devices
topic TK7855.M41 R43 no.577
url http://hdl.handle.net/1721.1/4176