Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Includes bibliographical references (p. 155-163).
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| Language: | eng |
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Research Laboratory of Electronics, Massachusetts Institute of Technology
2004
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| Online Access: | http://hdl.handle.net/1721.1/4187 |
| Summary: | Includes bibliographical references (p. 155-163). |
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