Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Includes bibliographical references (p. 155-163).
| Other Authors: | |
|---|---|
| Language: | eng |
| Published: |
Research Laboratory of Electronics, Massachusetts Institute of Technology
2004
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/4187 |
| _version_ | 1826202875915665408 |
|---|---|
| author2 | Early, Kathleen. |
| author_facet | Early, Kathleen. |
| collection | MIT |
| description | Includes bibliographical references (p. 155-163). |
| first_indexed | 2024-09-23T12:23:38Z |
| id | mit-1721.1/4187 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:23:38Z |
| publishDate | 2004 |
| publisher | Research Laboratory of Electronics, Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/41872019-04-10T16:32:46Z Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography Early, Kathleen. TK7855.M41 R43 no.565 Includes bibliographical references (p. 155-163). Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806 Kathleen R. Early. 2004-03-02T18:29:32Z 2004-03-02T18:29:32Z 1991 no. 565 http://hdl.handle.net/1721.1/4187 eng Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565. 163 p. 12011723 bytes application/pdf application/pdf Research Laboratory of Electronics, Massachusetts Institute of Technology |
| spellingShingle | TK7855.M41 R43 no.565 Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_full | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_fullStr | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_full_unstemmed | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_short | Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography |
| title_sort | experimental characterization and physical modeling of resolution limits in proximity printing x ray lithography |
| topic | TK7855.M41 R43 no.565 |
| url | http://hdl.handle.net/1721.1/4187 |