Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Includes bibliographical references (p. 155-163).

Bibliographic Details
Other Authors:	Early, Kathleen.
Language:	eng
Published:	Research Laboratory of Electronics, Massachusetts Institute of Technology 2004
Subjects:	TK7855.M41 R43 no.565
Online Access:	http://hdl.handle.net/1721.1/4187

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