Ion beam enhanced grain growth in thin films

Ion beam enhanced grain growth in thin films

Bibliography: p. 213-224.

Bibliographic Details
Other Authors:	Atwater, Harry Albert, 1960-
Language:	eng
Published:	Massachusetts Institute of Technology, Research Laboratory of Electronics 2004
Subjects:	TK7855.M41 R43 no.527
Online Access:	http://hdl.handle.net/1721.1/4216

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