High resolution imaging and lithography using interference of light and surface plasmon waves

High resolution imaging and lithography using interference of light and surface plasmon waves

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2007.

Bibliographic Details
Main Author: Kim, Yang-Hyo
Other Authors: Peter T.C. So.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/42303

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