Aligned T-gate, fabrication using X-ray lithography
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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| Formato: | Tesis |
| Lenguaje: | eng |
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Massachusetts Institute of Technology
2008
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| Acceso en línea: | http://hdl.handle.net/1721.1/43303 |
| Sumario: | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
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