Aligned T-gate, fabrication using X-ray lithography
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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| Формат: | Диссертация |
| Язык: | eng |
| Опубликовано: |
Massachusetts Institute of Technology
2008
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| Online-ссылка: | http://hdl.handle.net/1721.1/43303 |
| Итог: | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
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