Aligned T-gate, fabrication using X-ray lithography

Aligned T-gate, fabrication using X-ray lithography

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.

Manylion Llyfryddiaeth
Prif Awdur: Meinhold, Mitchell W., 1972-
Awduron Eraill: Henry I. Smith.
Fformat: Traethawd Ymchwil
Iaith:eng
Cyhoeddwyd: Massachusetts Institute of Technology 2008
Pynciau:
Electrical Engineering and Computer Science.
Mynediad Ar-lein:http://hdl.handle.net/1721.1/43303
Disgrifiad
Crynodeb:Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.

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