Aligned T-gate, fabrication using X-ray lithography

Aligned T-gate, fabrication using X-ray lithography

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.

Bibliographic Details
Main Author: Meinhold, Mitchell W., 1972-
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2008
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/43303

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