Silicon microaccelerometer fabrication technologies
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/43545 |
| _version_ | 1826205403603533824 |
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| author | Hsu, Charles Heng-Yuan, 1967- |
| author2 | Martin A. Schmidt. |
| author_facet | Martin A. Schmidt. Hsu, Charles Heng-Yuan, 1967- |
| author_sort | Hsu, Charles Heng-Yuan, 1967- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. |
| first_indexed | 2024-09-23T13:12:26Z |
| format | Thesis |
| id | mit-1721.1/43545 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:12:26Z |
| publishDate | 2008 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/435452019-04-12T08:56:45Z Silicon microaccelerometer fabrication technologies Hsu, Charles Heng-Yuan, 1967- Martin A. Schmidt. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 275-282). by Charles Heng-Yuan Hsu. Ph.D. 2008-11-07T20:10:30Z 2008-11-07T20:10:30Z 1997 1997 Thesis http://hdl.handle.net/1721.1/43545 38502766 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 282 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Hsu, Charles Heng-Yuan, 1967- Silicon microaccelerometer fabrication technologies |
| title | Silicon microaccelerometer fabrication technologies |
| title_full | Silicon microaccelerometer fabrication technologies |
| title_fullStr | Silicon microaccelerometer fabrication technologies |
| title_full_unstemmed | Silicon microaccelerometer fabrication technologies |
| title_short | Silicon microaccelerometer fabrication technologies |
| title_sort | silicon microaccelerometer fabrication technologies |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/43545 |
| work_keys_str_mv | AT hsucharleshengyuan1967 siliconmicroaccelerometerfabricationtechnologies |