Design of a CMOS compatible, athermal, optical waveguide
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/44819 |
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author | Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology |
author2 | Lionel C. Kimerling. |
author_facet | Lionel C. Kimerling. Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology |
author_sort | Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology |
collection | MIT |
description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007. |
first_indexed | 2024-09-23T14:26:54Z |
format | Thesis |
id | mit-1721.1/44819 |
institution | Massachusetts Institute of Technology |
language | eng |
last_indexed | 2024-09-23T14:26:54Z |
publishDate | 2009 |
publisher | Massachusetts Institute of Technology |
record_format | dspace |
spelling | mit-1721.1/448192019-04-10T11:13:57Z Design of a CMOS compatible, athermal, optical waveguide Design of a complementary metal oxide semiconductor compatible, athermal, optical waveguide Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology Lionel C. Kimerling. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Materials Science and Engineering. Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007. Includes bibliographical references (p. 49). This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1. by Luis Enrique Fernandez. S.B. 2009-03-16T19:47:27Z 2009-03-16T19:47:27Z 2007 2007 Thesis http://hdl.handle.net/1721.1/44819 301560446 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 49 p. application/pdf Massachusetts Institute of Technology |
spellingShingle | Materials Science and Engineering. Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology Design of a CMOS compatible, athermal, optical waveguide |
title | Design of a CMOS compatible, athermal, optical waveguide |
title_full | Design of a CMOS compatible, athermal, optical waveguide |
title_fullStr | Design of a CMOS compatible, athermal, optical waveguide |
title_full_unstemmed | Design of a CMOS compatible, athermal, optical waveguide |
title_short | Design of a CMOS compatible, athermal, optical waveguide |
title_sort | design of a cmos compatible athermal optical waveguide |
topic | Materials Science and Engineering. |
url | http://hdl.handle.net/1721.1/44819 |
work_keys_str_mv | AT fernandezluisenriquesbmassachusettsinstituteoftechnology designofacmoscompatibleathermalopticalwaveguide AT fernandezluisenriquesbmassachusettsinstituteoftechnology designofacomplementarymetaloxidesemiconductorcompatibleathermalopticalwaveguide |