A wireless robotic manipulator for semiconductor manufacturing equipment

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliografski detalji
Glavni autor:	Scrivens, Jevin E. (Jevin Eugene)
Daljnji autori:	Alexander Slocum.
Format:	Disertacija
Jezik:	eng
Izdano:	Massachusetts Institute of Technology 2009
Teme:	Mechanical Engineering
Online pristup:	http://hdl.handle.net/1721.1/44897

Internet

http://hdl.handle.net/1721.1/44897