A wireless robotic manipulator for semiconductor manufacturing equipment

A wireless robotic manipulator for semiconductor manufacturing equipment

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author: Scrivens, Jevin E. (Jevin Eugene)
Other Authors: Alexander Slocum.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/44897

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