Xie, X., & Litster, D. B. a. D. (2009). Physical understanding and modeling of chemical mechanical planarization in dielectric materials. Massachusetts Institute of Technology.
Chicago Style (17th ed.) CitationXie, Xiaolin, and Duane Boning and David Litster. Physical Understanding and Modeling of Chemical Mechanical Planarization in Dielectric Materials. Massachusetts Institute of Technology, 2009.
MLA (9th ed.) CitationXie, Xiaolin, and Duane Boning and David Litster. Physical Understanding and Modeling of Chemical Mechanical Planarization in Dielectric Materials. Massachusetts Institute of Technology, 2009.
Warning: These citations may not always be 100% accurate.