Physical understanding and modeling of chemical mechanical planarization in dielectric materials

Physical understanding and modeling of chemical mechanical planarization in dielectric materials

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Physics, 2007.

Opis bibliograficzny
1. autor:	Xie, Xiaolin, Ph. D. Massachusetts Institute of Technology
Kolejni autorzy:	Duane Boning and David Litster.
Format:	Praca dyplomowa
Język:	eng
Wydane:	Massachusetts Institute of Technology 2009
Hasła przedmiotowe:	Physics.
Dostęp online:	http://hdl.handle.net/1721.1/45403

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