The development and characterization of kinematic interfaces for the semiconductor industry

The development and characterization of kinematic interfaces for the semiconductor industry

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Bibliographic Details
Main Author: Alden, John C. (John Christopher)
Other Authors: Alexander Slocum.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/46052

Similar Items

Similar Items