Characterization of low k CVD deposited interlayer dielectrics for integrated circuits

Characterization of low k CVD deposited interlayer dielectrics for integrated circuits

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.

Bibliographic Details
Main Author:	Harker, Marnie L. (Marnie Lynn), 1974-
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/46100

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