Design, fabrication and testing of a lateral self-cleaning MEMS switch

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2004.

Bibliographic Details
Main Author:	Shi, Yong, 1965-
Other Authors:	Sang-Gook Kim.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Aeronautics and Astronautics.
Online Access:	http://hdl.handle.net/1721.1/46559

Internet

http://hdl.handle.net/1721.1/46559