Design, fabrication and testing of a lateral self-cleaning MEMS switch

Design, fabrication and testing of a lateral self-cleaning MEMS switch

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2004.

Bibliographic Details
Main Author: Shi, Yong, 1965-
Other Authors: Sang-Gook Kim.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Aeronautics and Astronautics.
Online Access:http://hdl.handle.net/1721.1/46559

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