Titanium nitride thin films by the electron shower process
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.
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Format: | Thesis |
Language: | eng |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/50025 |
Summary: | Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. |
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