Titanium nitride thin films by the electron shower process

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.

Bibliographic Details
Main Author: LeClair, Patrick R. (Patrick Royce), 1976-
Other Authors: Jagadeesh S. Moodera and Caroline A. Ross.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2009
Subjects:
Online Access:http://hdl.handle.net/1721.1/50025