Non-perfluorocompound chemistries for dielectric etching applications
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/50031 |
| _version_ | 1826206172685795328 |
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| author | Pruette, Laura C. (Laura Catherine), 1974- |
| author2 | Rafael Reif. |
| author_facet | Rafael Reif. Pruette, Laura C. (Laura Catherine), 1974- |
| author_sort | Pruette, Laura C. (Laura Catherine), 1974- |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. |
| first_indexed | 2024-09-23T13:25:14Z |
| format | Thesis |
| id | mit-1721.1/50031 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:25:14Z |
| publishDate | 2009 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/500312019-04-10T17:59:39Z Non-perfluorocompound chemistries for dielectric etching applications Pruette, Laura C. (Laura Catherine), 1974- Rafael Reif. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 99-101). by Laura C. Pruette. M.S. 2009-12-10T19:02:59Z 2009-12-10T19:02:59Z 1998 1998 Thesis http://hdl.handle.net/1721.1/50031 40295566 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 102 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Pruette, Laura C. (Laura Catherine), 1974- Non-perfluorocompound chemistries for dielectric etching applications |
| title | Non-perfluorocompound chemistries for dielectric etching applications |
| title_full | Non-perfluorocompound chemistries for dielectric etching applications |
| title_fullStr | Non-perfluorocompound chemistries for dielectric etching applications |
| title_full_unstemmed | Non-perfluorocompound chemistries for dielectric etching applications |
| title_short | Non-perfluorocompound chemistries for dielectric etching applications |
| title_sort | non perfluorocompound chemistries for dielectric etching applications |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/50031 |
| work_keys_str_mv | AT pruettelauraclauracatherine1974 nonperfluorocompoundchemistriesfordielectricetchingapplications |