Sub-50nm x-ray lithography with application to a coupled quantum dot device
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/50037 |
| _version_ | 1826197543445331968 |
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| author | Carter, David John Donat, 1966- |
| author2 | Henry I. Smith and Terry P. Orlando. |
| author_facet | Henry I. Smith and Terry P. Orlando. Carter, David John Donat, 1966- |
| author_sort | Carter, David John Donat, 1966- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. |
| first_indexed | 2024-09-23T10:49:17Z |
| format | Thesis |
| id | mit-1721.1/50037 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:49:17Z |
| publishDate | 2009 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/500372019-04-12T20:14:41Z Sub-50nm x-ray lithography with application to a coupled quantum dot device Carter, David John Donat, 1966- Henry I. Smith and Terry P. Orlando. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 214-231). by David John Donat Carter. Ph.D. 2009-12-10T19:03:50Z 2009-12-10T19:03:50Z 1998 1998 Thesis http://hdl.handle.net/1721.1/50037 40335770 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 231 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Carter, David John Donat, 1966- Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title | Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title_full | Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title_fullStr | Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title_full_unstemmed | Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title_short | Sub-50nm x-ray lithography with application to a coupled quantum dot device |
| title_sort | sub 50nm x ray lithography with application to a coupled quantum dot device |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/50037 |
| work_keys_str_mv | AT carterdavidjohndonat1966 sub50nmxraylithographywithapplicationtoacoupledquantumdotdevice |