Sub-50nm x-ray lithography with application to a coupled quantum dot device

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.

Bibliographic Details
Main Author:	Carter, David John Donat, 1966-
Other Authors:	Henry I. Smith and Terry P. Orlando.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2009
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/50037

Internet

http://hdl.handle.net/1721.1/50037